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Microfabrication and Nanotechnology
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Author:
Marc MadouLanguage:
English
Category:
TechnologySection:
Pages:
658
Quality:
excellent
Views:
736
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Book Description
Designed for science and engineering students, Manufacturing Techniques for Microfabrication and Nanotechnology focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies, detailing those that differ the most from the miniaturization processes used to fashion ICs. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Readers should use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
Marc Madou
Distinguished Professor in Nanoengineering School of Engineering and Science Expertise Nanotechnology Metal nanoparticle embedding into Carbon Nanofibers Nano Gap Renowned researcher in miniaturization sciences (micro- and nano-electromechanical systems). Vice President at the Nanogen Advanced Technology, founder of Teknekron Sensor Development Corporation, and consultant at his own firm since 1993. He´s been a Distinguished Professor at the University of California Irvine and at the Materials Research Center at Ohio State University. Director of the NSF Center for Industrial Sensors and Measurements. Visiting Professor at UC Berkeley University and Louisiana State University. He has published more than 200 articles in specialized magazines, is a member of the editorial boards of various publications and has published 11 books.Ph.D., Rijksuniversiteit, Ghent, Belgium, Semiconductor Electrochemistry, Solid-State Physics Laboratory, 1978
, M.Sc., Rijksuniversiteit, Ghent, Belgium, Physical Chemistry B.Sc., Rijksuniversiteit,Ghent,Belgium, Physical Chemistry, 1973.Ph.D., Semiconductor Electrochemistry (Physical Chemistry-Solid State Physics), 1978.
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