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From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications
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Author:
Marc MadouLanguage:
English
Category:
TechnologySection:
Pages:
642
Quality:
excellent
Views:
580
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Book Description
From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling laws in MEMS and NEMS, actuators, fluidics, and power and brains in miniature devices. He concludes with coverage of various MEMS and NEMS applications. Fully illustrated in color, the text contains end-of-chapter problems, worked examples, extensive references for further reading, and an extensive glossary of terms.
Marc Madou
Distinguished Professor in Nanoengineering School of Engineering and Science Expertise Nanotechnology Metal nanoparticle embedding into Carbon Nanofibers Nano Gap Renowned researcher in miniaturization sciences (micro- and nano-electromechanical systems). Vice President at the Nanogen Advanced Technology, founder of Teknekron Sensor Development Corporation, and consultant at his own firm since 1993. He´s been a Distinguished Professor at the University of California Irvine and at the Materials Research Center at Ohio State University. Director of the NSF Center for Industrial Sensors and Measurements. Visiting Professor at UC Berkeley University and Louisiana State University. He has published more than 200 articles in specialized magazines, is a member of the editorial boards of various publications and has published 11 books.Ph.D., Rijksuniversiteit, Ghent, Belgium, Semiconductor Electrochemistry, Solid-State Physics Laboratory, 1978
, M.Sc., Rijksuniversiteit, Ghent, Belgium, Physical Chemistry B.Sc., Rijksuniversiteit,Ghent,Belgium, Physical Chemistry, 1973.Ph.D., Semiconductor Electrochemistry (Physical Chemistry-Solid State Physics), 1978.
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